|
IEC 62047-34
Edition 1.0 2019-04
INTERNATIONAL
STANDARD
colour
inside
Semiconductor devices – Micro-electromechanical devices –
Part 34: Test methods for MEMS piezoresistive pressure-sensitive device on
wafer
your local IEC member National Committee for further information.
IEC Central Office Tel.: +41 22 919 02 11
3, rue de
CH-1211 Geneva 20
Switzerland
About the IEC
The International Electrotechnical Commission (IEC) is the leading global organization that prepares and publishes
International Standards for all electrical, electronic and related technologies.
About IEC publications
The technical content of IEC publications is kept under constant review by the IEC. Please make sure that you have the
latest edition, a corrigendum or an amendment might have been published.
IEC publications search - webstore.iec.ch/advsearchform Electropedia - www.electropedia.org
The advanced search enables to find IEC publications by a The world's leading online dictionary on electrotechnology,
variety of criteria (reference number, text, technical containing more than 22 000 terminological entries in English
committee,…). It also gives information on projects, replaced and French, with equivalent terms in 16 additional languages.
and withdrawn publications. Also known as the International Electrotechnical Vocabulary
(IEV) online.
IEC Just Published - webstore.iec.ch/justpublished
Stay up to date on all new IEC publications. Just Published IEC Glossary - std.iec.ch/glossary
details all new publications released. Available online and 67 000 electrotechnical terminology entries in English and
once a month by email. French extracted from the Terms and Definitions clause of
IEC publications issued since 2002. Some entries have been
IEC Customer Service Centre - webstore.iec.ch/csc collected from earlier publications of IEC TC 37, 77, 86 and
If you wish to give us your feedback on this publication or CISPR.
need further assistance, please contact the Customer Service
.
IEC 62047-34
Edition 1.0 2019-04
INTERNATIONAL
STANDARD
colour
inside
Semiconductor devices – Micro-electromechanical devices –
Part 34: Test methods for MEMS piezoresistive pressure-sensitive device on
wafer
INTERNATIONAL
ELECTROTECHNICAL
COMMISSION
ICS 31.080.99; 31.140 ISBN 978-2-8322-6719-6
– 2 – IEC 62047-34:2019 © IEC 2019
CONTENTS
FOREWORD . 3
1 Scope . 5
2 Normative references . 5
3 Terms and definitions . 5
4 Test conditions . 6
4.1 Atmospheric conditions . 6
4.2 Electromagnetic conditions . 6
4.3 Vibration conditions . 6
4.4 Test system . 6
5 General provisions. 7
5.1 Certificate documents . 7
5.2 Placement and preheating time . 7
5.3 Connection . 7
6 Test items and methods. 7
6.1 Test preparation. 7
6.2 Resistance . 7
6.2.1 Purpose . 7
6.2.2 Test methods . 7
6.3 Static performances . 8
6.3.1 Purpose . 8
6.3.2 Test items . 8
6.3.3 Test method . 9
6.4 Thermal performances . 13
6.4.1 Purpose . 13
6.4.2 Test items . 14
6.4.3 Test method . 14
Bibliography . 16
Figure 1 – Closed loop bridge . 8
Figure 2 – Open loop bridge . 8
Figure 3 – Five-point sampling . 9
INTERNATIONAL ELECTROTECHNICAL COMMISSION
____________
SEMICONDUCTOR DEVICES –
MICRO-ELECTROMECHANICAL DEVICES –
Part 34: Test methods for MEMS piezoresistive
pressure-sensitive device on wafer
FOREWORD
1) The International Electrotechnical Commission (IEC) is a worldwide organization for standardization comprising
all national electrotechnical committees (IEC National Committees). The object of IEC is to promote
international co-operation on all questions concerning standardization in the electrical and electronic fields. To
this end and in addition to other activities, IEC publishes International Standards, Technical Specifications,
Technical Reports, Publicly Available Specifications (PAS) and Guides (hereafter referred to as “IEC
Publication(s)”). Their preparation is entrusted to technical committees; any IEC National Committee interested
in the subject dealt with may participate in this preparatory work. International, governmental and non-
governmental organizations liaising with the IEC also participate in this preparation. IEC collaborates closely
with the International Organization for Standardization (ISO) in accordance with conditions determined by
agreement between the two organizations.
2) The formal decisions or agreements of IEC on technical matters express, as nearly as possible, an international
consensus of opinion on the relevant subjects since each technical committee has representation from all
interested IEC National Committees.
3) IEC Publications have the form of recommendations for international use and are accepted by IEC National
Committees in that sense. While all reasonable efforts are made to ensure that the technical content of IEC
Publications is accurate, IEC cannot be held responsible for the way in which they are used or for any
misinterpretation by any end user.
4) In order to promote international uniformity, IEC National Committees undertake to apply IEC Publications
transparently to the maximum extent possible in their national and regional publications. Any divergence
between any IEC Publication and the corresponding national or regional publication shall be clearly indicated in
the latter.
5) IEC itself does not provide any attestation of conformity. Independent certification bodies provide conformity
assessment services and, in some areas, access to IEC marks of conformity. IEC is not responsible for any
services carried out by independent certification bodies.
6) All users should ensure that they have the latest edition of this publication.
7) No liability shall attach to IEC or its directors, employees, servants or agents including individual experts and
members of its technical committees and IEC National Committees for any personal injury, property damage or
other damage of any nature whatsoever, whether direct or indirect, or for costs (including legal fees) and
expenses arising out of the publication, use of, or reliance upon, this IEC Publication or any other IEC
Publications.
8) Attention is drawn to the Normative references cited in this publication. Use of the referenced publications is
indispensable for the correct application of this publication.
9) Attention is drawn to the possibility that some of the elements of this IEC Publication may be the subject of
patent rights. IEC shall not be held responsible for identifying any or all such patent rights.
International Standard IEC 62047-34 has been prepared by subcommittee 47F: Micro-
electromechanical systems, of IEC technical committee 47: Semiconductor devices.
The text of this International Standard is based on the following documents:
FDIS Report on voting
47F/328/FDIS 47F/333/RVD
Full information on the voting for the approval of this International Standard can be found in
the report on voting indicated in the above table.
This document has been drafted in accordance with the ISO/IEC Directives, Part 2.
– 4 – IEC 62047-34:2019 © IEC 2019
A list of all parts in the IEC 62047 series, published under the general title Semiconductor
devices – Micro-electromechanical devices, can be found on the IEC website.
The committee has decided that the contents of this document will remain unchanged until the
stability date indicated on the IEC website under "http://webstore.iec.ch" in the data related to
the specific document. At this date, the document will be
• reconfirmed,
• withdrawn,
• replaced by a revised edition, or
• amended.
A bilingual version of this publication may be issued at a later date.
IMPORTANT – The 'colour inside' logo on the cover page of this publication indicates
that it contains colours which are considered to be useful for the correct
understanding of its contents. Users should therefore print this document using a
colour printer.
SEMICONDUCTOR DEVICES –
MICRO-ELECTROMECHANICAL DEVICES –
Part 34: Test methods for MEMS piezoresistive
pressure-sensitive device on wafer
1 Scope
This part of IEC 62047 describes test conditions and test methods of electric character, static
performances and thermal performances for MEMS pressure-sensitive devices. This
document applies to test for both open and closed loop piezoresistive MEMS pressure
devices on wafer.
2 Normative references
The following documents are referred to in the text in such a way that some or all of their
content constitutes requirements of this document. For dated references, only the edition
cited applies. For undated references, the latest edition of the referenced document (including
any amendments) applies.
IEC 61193-2, Quality assessment systems – Part 2: Selection and use of sampling plans for
inspection of electronic components and packages
IEC 60747-14-3, Semiconductor devices – Part 14-3: Semiconductor sensors – Pressure
sensors
3 Terms and definitions
For the purposes of this document, the terms and definitions given in IEC 60747-14-3 and the
following apply.
ISO and IEC maintain terminological databases for use in standardization at the following
addresses:
• IEC Electropedia: available at http://www.electropedia.org/
• ISO Online browsing platform: available at http://www.iso.org/obp
3.1
piezoresistive pressure-sensitive device
device that transforms pressure signal into electric signal due to piezoresistive effect, usually
including cavity-membrane structure on silicon substrate and Wheatstone bridge in the
membrane fabricated by MEMS technology
[SOURCE: IEC 62047-33: –, 3.1]
3.2
closed loop piezoresistive pressure-sensitive device
piezoresistive pressure-sensitive device that employs closed loop Wheatstone bridge for
signal detection
– 6 – IEC 62047-34:2019 © IEC 2019
3.3
open loop piezoresistive pressure-sensitive device
piezoresistive pressure-sensitive device that employs open loop Wheatstone bridge for signal
detection
3.4
output under normal pressure
output of the pressure-sensitive device under the standard reference atmosphere
pressure(101,3 kPa)
3.5
zero output
output of the pressure-sensitive device when the pressure difference between both sides of
the membrane structure is zero
4 Test conditions
4.1 Atmospheric conditions
The measurement of characteristics shall be carried out under the following atmospheric
conditions unless otherwise specified.
a) Standard atmospheric conditions
...