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IEC 62951-6
Edition 1.0 2019-05
INTERNATIONAL
STANDARD
NORME
INTERNATIONALE
colour
inside
Semiconductor devices – Flexible and stretchable semiconductor devices –
Part 6: Test method for sheet resistance of flexible conducting films
Dispositifs à semiconducteurs – Dispositifs à semiconducteurs souples
et extensibles –
Partie 6: Méthode d’essai pour la résistance de couche des couches
conductrices souples
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IEC 62951-6
Edition 1.0 2019-05
INTERNATIONAL
STANDARD
NORME
INTERNATIONALE
colour
inside
Semiconductor devices – Flexible and stretchable semiconductor devices –
Part 6: Test method for sheet resistance of flexible conducting films
Dispositifs à semiconducteurs – Dispositifs à semiconducteurs souples
et extensibles –
Partie 6: Méthode d’essai pour la résistance de couche des couches
conductrices souples
INTERNATIONAL
ELECTROTECHNICAL
COMMISSION
COMMISSION
ELECTROTECHNIQUE
INTERNATIONALE
ICS 31.080.99 ISBN 978-2-8322-6871-1
– 2 – IEC 62951-6:2019 © IEC 2019
CONTENTS
FOREWORD . 4
1 Scope . 6
2 Normative references . 6
3 Terms and definitions . 6
4 Atmospheric conditions for evaluation and conditioning . 7
5 In situ measurements using 2-point probe method . 8
5.1 General . 8
5.2 Sample preparation . 8
5.3 Test methods . 8
5.3.1 Test apparatus . 8
5.3.2 Measurement and data analysis . 9
5.4 Report of results . 9
6 Uniformity measurement using 4-point probe method . 10
6.1 General . 10
6.2 Test methods . 10
6.2.1 Test apparatus . 10
6.2.2 Measurement and data analysis . 10
6.3 Report of results . 11
7 Anisotropic measurement using the Montgomery method . 12
7.1 General . 12
7.2 Test methods . 12
7.2.1 Test apparatus . 12
7.2.2 Measurement and data analysis . 12
7.3 Report of results . 13
Annex A (informative) Bending tests . 14
Annex B (informative) 4-point probe measurements . 15
B.1 General . 15
B.2 Correction for finite sample size . 15
B.3 Correction factors accounting for finite size probe tips . 20
Annex C (informative) Montgomery method. 22
C.1 General . 22
C.2 Sample preparation . 22
C.3 Measurement of sheet resistance of isotropic sample . 23
C.4 Measurement of anisotropic sheet resistance . 24
Bibliography . 25
Figure 1 – Possible electric connection of 2-point probe measurement . 8
Figure 2 – Gauge section of bending test . 9
Figure 3 – Example of measuring positions . 11
Figure 4 – Direction of bending and collinear probes . 11
Figure 5 – Resistance measurement with the Montgomery method . 13
Figure A.1 – Two common bending test methods for flexible substrates . 14
Figure B.1 – Schematic diagram of 4-point probe . 15
Figure B.2 – Correction factor of square sample depending on length/probe spacing [2] . 17
Figure B.3 – Correction factor depending on measuring position when collinear probes
are directed vertically . 18
Figure B.4 – Correction factor depending on measuring position when collinear probes
are directed horizontally . 18
Figure B.5 – Correction factor, f depending on measuring positions and direction of
collinear probes . 19
Figure B.6 – Example of probe with a finite contact diameter (e.g. 2mm) comparable to
inter-distance between probes (e.g. 5 mm) . 20
Figure B.7 – Dimensional sketch of probe with a finite contact diameter . 21
Figure C.1 – Possible contact placements of square or rectangular sample . 22
Figure C.2 – Correction factors for finite contact size on resistivity measurement [4] . 23
Figure C.3 – Resistance measurement of Montgomery method . 24
– 4 – IEC 62951-6:2019 © IEC 2019
INTERNATIONAL ELECTROTECHNICAL COMMISSION
____________
SEMICONDUCTOR DEVICES –
FLEXIBLE AND STRETCHABLE SEMICONDUCTOR DEVICES –
Part 6: Test method for sheet resistance of flexible conducting films
FOREWORD
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