|
IEC TS 62607-5-3
Edition 1.0 2020-04
TECHNICAL
SPECIFICATION
colour
inside
Nanomanufacturing – Key control characteristics –
Part 5-3: Thin-film organic/nano electronic devices – Measurements of charge
carrier concentration
your local IEC member National Committee for further information.
IEC Central Office Tel.: +41 22 919 02 11
3, rue de
CH-1211 Geneva 20
Switzerland
About the IEC
The International Electrotechnical Commission (IEC) is the leading global organization that prepares and publishes
International Standards for all electrical, electronic and related technologies.
About IEC publications
The technical content of IEC publications is kept under constant review by the IEC. Please make sure that you have the
latest edition, a corrigendum or an amendment might have been published.
IEC publications search - webstore.iec.ch/advsearchform Electropedia - www.electropedia.org
The advanced search enables to find IEC publications by a The world's leading online dictionary on electrotechnology,
variety of criteria (reference number, text, technical containing more than 22 000 terminological entries in English
committee,…). It also gives information on projects, replaced and French, with equivalent terms in 16 additional languages.
and withdrawn publications. Also known as the International Electrotechnical Vocabulary
(IEV) online.
IEC Just Published - webstore.iec.ch/justpublished
Stay up to date on all new IEC publications. Just Published IEC Glossary - std.iec.ch/glossary
details all new publications released. Available online and once 67 000 electrotechnical terminology entries in English and
a month by email. French extracted from the Terms and Definitions clause of IEC
publications issued since 2002. Some entries have been
IEC Customer Service Centre - webstore.iec.ch/csc collected from earlier publications of IEC TC 37, 77, 86 and
If you wish to give us your feedback on this publication or need CISPR.
further assistance, please contact the Customer Service
.
IEC TS 62607-5-3
Edition 1.0 2020-04
TECHNICAL
SPECIFICATION
colour
inside
Nanomanufacturing – Key control characteristics –
Part 5-3: Thin-film organic/nano electronic devices – Measurements of charge
carrier concentration
INTERNATIONAL
ELECTROTECHNICAL
COMMISSION
ICS 07.030; 07.120 ISBN 978-2-8322-8073-7
– 2 – IEC TS 62607-5-3:2020 IEC 2020
CONTENTS
FOREWORD . 3
INTRODUCTION . 5
1 Scope . 6
2 Normative references . 6
3 Terms and definitions . 6
4 Sample structures . 6
4.1 Metal/insulator/semiconductor (MIS) structure . 6
4.2 Thin-film specimens with the van der Pauw configuration . 7
5 Criteria for choosing a method for measuring carrier concentration in organic
semiconductor layers . 8
6 Appropriate data formats . 8
Annex A (informative) Case study of carrier concentration measurements of organic
materials . 10
A.1 Procedure of capacitance-voltage (C-V) measurement . 10
A.2 Capacitance-voltage measurement for unoptimized pentacene MIS
structures . 11
A.3 Influences of semiconductor layer thickness and electrode contact
conditions on C-V measurements . 13
A.4 Capacitance-voltage measurement for a pentacene MIS structure with an
ultrathin insulator . 14
A.5 Procedure of Hall-effect measurement . 17
A.6 Hall-effect measurement for organic semiconductor single-crystalline layers . 18
Bibliography . 20
Figure 1 – Typical metal/insulator/semiconductor (MIS) structures . 7
Figure 2 – An organic MIS structure favourable for capacitance-voltage measurements . 7
Figure 3 – Sample structures for Hall-effect measurement with the van der Pauw
configuration . 8
Figure A.1 – Equivalent circuit model for capacitance-voltage measurement with MIS
structure . 10
Figure A.2 – Typical capacitance-voltage curves observed for MIS structures with
organic semiconductor films . 11
Figure A.3 – Capacitance-voltage curves obtained for the MIS structure with 70-nm-
thick-pentacene film . 12
Figure A.5 – Capacitance-voltage curves obtained for a pentacene MIS structure with
an ultrathin SAM-modified AlOx insulator . 16
Figure A.6 – Hall-effect measurement results for rubrene single-crystalline layer doped
with ferric chloride . 19
Table 1 – Possible data format to be given together with carrier concentrations
obtained with capacitance-voltage measurements. 9
Table 2 – Possible data format to be given together with carrier concentrations
obtained with the Hall-effect measurements . 9
INTERNATIONAL ELECTROTECHNICAL COMMISSION
____________
NANOMANUFACTURING –
KEY CONTROL CHARACTERISTICS –
Part 5-3: Thin-film organic/nano electronic devices –
Measurements of charge carrier concentration
FOREWORD
1) The International Electrotechnical Commission (IEC) is a worldwide organization for standardization comprising
all national electrotechnical committees (IEC National Committees). The object of IEC is to promote international
co-operation on all questions concerning standardization in the electrical and electronic fields. To this end and
in addition to other activities, IEC publishes International Standards, Technical Specifications, Technical Reports,
Publicly Available Specifications (PAS) and Guides (hereafter referred to as “IEC Publication(s)”). Their
preparation is entrusted to technical committees; any IEC National Committee interested in the subject dealt with
may participate in this preparatory work. International, governmental and non-governmental organizations liaising
with the IEC also participate in this preparation. IEC collaborates closely with the International Organization for
Standardization (ISO) in accordance with conditions determined by agreement between the two organizations.
2) The formal decisions or agreements of IEC on technical matters express, as nearly as possible, an international
consensus of opinion on the relevant subjects since each technical committee has representation from all
interested IEC National Committees.
3) IEC Publications have the form of recommendations for international use and are accepted by IEC National
Committees in that sense. While all reasonable efforts are made to ensure that the technical content of IEC
Publications is accurate, IEC cannot be held responsible for the way in which they are used or for any
misinterpretation by any end user.
4) In order to promote international uniformity, IEC National Committees undertake to apply IEC Publications
transparently to the maximum extent possible in their national and regional publications. Any divergence between
any IEC Publication and the corresponding national or regional publication shall be clearly indicated in the latter.
5) IEC itself does not provide any attestation of conformity. Independent certification bodies provide conformity
assessment services and, in some areas, access to IEC marks of conformity. IEC is not responsible for any
services carried out by independent certification bodies.
6) All users should ensure that they have the latest edition of this publication.
7) No liability shall attach to IEC or its directors, employees, servants or agents including individual experts and
members of its technical committees and IEC National Committees for any personal injury, property damage or
other damage of any nature whatsoever, whether direct or indirect, or for costs (including legal fees) and
expenses arising out of the publication, use of, or reliance upon, this IEC Publication or any other IEC Publications.
8) Attention is drawn to the Normative references cited in this publication. Use of the referenced publications is
indispensable for the correct application of this publication.
9) Attention is drawn to the possibility that some of the elements of this IEC Publication may be the subject of patent
rights. IEC shall not be held responsible for identifying any or all such patent rights.
The main task of IEC technical committees is to prepare International Standards. In exceptional
circumstances, a technical committee may propose the publication of a Technical Specification
when
• the required support cannot be obtained for the publication of an International Standard,
despite repeated efforts, or
• the subject is still under technical development or where, for any other reason, there is the
future but no immediate possibility of an agreement on an International Standard.
Technical Specifications are subject to review within three years of publication to decide
whether they can be transformed into International Standards.
IEC TS 62607-5-3, which is a Technical Specification, has been prepared by IEC technical
committee 113: Nanotechnology for electrotechnical products and systems.
– 4 – IEC TS 62607-5-3:2020 IEC 2020
The text of this Technical Specification is based on the following documents:
Draft TS Report on voting
113/477/DTS 113/523/RVDTS
Full information on the voting for the approval of this Technical Specification can be found in
the report on voting indicated in the above table.
This publication has been drafted in accordance with the ISO/IEC Directives, Part 2.
A list of all parts in the IEC TS 62607 series, published under the general title
Nanomanufacturing – Key control characteristics, can be found on the IEC website.
The committee has decided that the contents of this publication will remain unchanged until the
stability date indicated on the IEC website under "http://webstore.iec.ch" in the data related to
the specific publication. At this date, the publication will be
• transformed into an International Standard,
• reconfirmed,
• withdrawn,
• replaced by a revised edition, or
• amended.
IMPORTANT – The 'colour inside' logo on the cover page of this publication indicates
that it contains colours which are considered to be useful for the correct understanding
of its contents. Users should therefore print this document using a colour printer.
INTRODUCTION
Organic/nano thin-film devices are attracting much attention as promising candidates for light,
low cost, flexible, and printable devices in large-area electronics applications. Recently, charge
carrier doping techniques have been intensely studied and developed, in the same way as the
mature silicon technologies. In organic light-emitting diodes (OLEDs) and organic thin-film
transistors (OTFTs), which are typical organic/nano thin-film devices, carrier doping around
contact electrode regions with molecular donor/acceptor dopants are often utilized to make
ohmic-like contacts for the purpose of increasing electric current in the devices. While the great
importance of carrier doping in organic/nano layers is well recognized, the carrier doping
mechanisms have not been fully understood yet, and the evaluation method of charge carrier
concentration in these materials has not been established.
Conventional representative methods for evaluating charge carrier concentrations (or dopant
concentrations) and the type of charge carrier (electron or hole) in inorganic semiconductor
materials are Hall-effect measurements and capacitance-voltage measurements. For exa
...