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IEC 63041-3
Edition 1.0 2020-08
INTERNATIONAL
STANDARD
NORME
INTERNATIONALE
Piezoelectric sensors –
Part 3: Physical sensors
Capteurs piézoélectriques –
Partie 3: Capteurs physiques
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IEC 63041-3
Edition 1.0 2020-08
INTERNATIONAL
STANDARD
NORME
INTERNATIONALE
Piezoelectric sensors –
Part 3: Physical sensors
Capteurs piézoélectriques –
Partie 3: Capteurs physiques
INTERNATIONAL
ELECTROTECHNICAL
COMMISSION
COMMISSION
ELECTROTECHNIQUE
INTERNATIONALE
ICS 31.140 ISBN 978-2-8322-8742-2
– 2 – IEC 63041-3:2020 © IEC 2020
CONTENTS
FOREWORD . 3
1 Scope . 5
2 Normative references . 5
3 Terms, definitions, symbols and units . 5
3.1 Terms and definitions . 5
3.2 Symbols and units. 6
4 Specifications . 6
4.1 General . 6
4.2 Conceptual diagrams of sensor types. 6
4.2.1 General . 6
4.2.2 Conceptual diagram for sensor elements of SAW resonator type . 7
4.2.3 Conceptual diagram for sensor elements of SAW delay-line type . 7
4.3 Technical documents . 8
5 Delivery conditions . 8
6 Quality and reliability . 8
7 Test and measurement procedures . 8
Annex A (informative) Physical reaction in sensor cell and detection method . 9
A.1 Detection and measurement . 9
A.2 Typical formulae for detection methods of physical quantity . 9
A.2.1 General . 9
A.2.2 Non-acoustic type . 9
A.2.3 Acoustic type . 10
A.2.4 Delay-line type. 11
A.3 Calibration . 11
Bibliography . 12
Figure 1 – Conceptual diagram for SAW single resonator type . 7
Figure 2 – Conceptual diagram for SAW differential resonator type . 7
Figure 3 – Conceptual diagram for SAW transmission (two-port) delay-line type . 7
Figure 4 – Conceptual diagram for SAW reflective (one-port) delay-line type . 8
INTERNATIONAL ELECTROTECHNICAL COMMISSION
____________
PIEZOELECTRIC SENSORS –
Part 3: Physical sensors
FOREWORD
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International Standard IEC 63041-3 has been prepared by IEC technical committee TC 49:
Piezoelectric, dielectric and electrostatic devices and associated materials for frequency
control, selection and detection.
The text of this International Standard is based on the following documents:
CDV Report on voting
49/1333/CDV 49/1343/RVC
Full information on the voting for the approval of this International Standard can be found in
the report on voting indicated in the above table.
This document has been drafted in accordance with the ISO/IEC Directives, Part 2.
– 4 – IEC 63041-3:2020 © IEC 2020
A list of all part in the IEC 63041 series, published under the general title Piezoelectric
sensors, can be found on the IEC website.
The committee has decided that the contents of this document will remain unchanged until the
stability date indicated on the IEC website under "http://webstore.iec.ch" in the data related to
the specific document. At this date, the document will be
• reconfirmed,
• withdrawn,
• replaced by a revised edition, or
• amended.
PIEZOELECTRIC SENSORS –
Part 3: Physical sensors
1 Scope
This part of IEC 63041 is applicable to piezoelectric physical sensors mainly used in the field
of process control, wireless monitoring, dynamics, thermodynamics, vacuum engineering, and
environmental sciences. This document provides users with technical guidelines as well as
basic knowledge of common physical sensors.
Piezoelectric sensors covered herein are those applied to the detection and measurement of
physical quantities such as force, pressure, torque, viscosity, temperature, film thickness,
acceleration, vibration, and tilt angle.
2 Normative references
The following documents are referred to in the text in such a way that some or all of their
content constitutes requirements of this document. For dated references, only the edition
c
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