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IEC TS 62607-6-10
Edition 1.0 2021-10
TECHNICAL
SPECIFICATION
colour
inside
Nanomanufacturing – Key control characteristics –
Part 6-10: Graphene-based material – Sheet resistance: Terahertz time-domain
spectroscopy
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IEC TS 62607-6-10
Edition 1.0 2021-10
TECHNICAL
SPECIFICATION
colour
inside
Nanomanufacturing – Key control characteristics –
Part 6-10: Graphene-based material – Sheet resistance: Terahertz time-domain
spectroscopy
INTERNATIONAL
ELECTROTECHNICAL
COMMISSION
ICS 07.120 ISBN 978-2-8322-1033-3
– 2 – IEC TS 62607-6-10:2021 © IEC 2021
CONTENTS
FOREWORD . 4
INTRODUCTION . 6
1 Scope . 7
2 Normative references . 7
3 Terms and definitions . 7
3.1 General terms . 7
3.2 Key control characteristics measured according to this document . 9
3.3 Terms related to the measurement method described in this document . 10
4 General . 11
4.1 Measurement principle . 11
4.2 Sample preparation method . 13
4.3 Description of measurement equipment . 13
4.3.1 Principal components of a THz-TDS system . 13
4.3.2 Measurement configurations . 14
4.4 Supporting materials . 16
4.5 Calibration standards . 17
4.6 Measurement conditions . 17
5 Measurement procedure . 17
5.1 Calibration of the measurement equipment . 17
5.2 Detailed protocol of the measurement procedure . 17
5.3 Measurement accuracy . 19
6 Data analysis / interpretation of results . 20
7 Results to be reported . 24
7.1 Cover sheet . 24
7.2 Measurement conditions . 24
7.3 Measurement specific information . 24
7.4 Measurement results . 25
Annex A (informative) Worked example . 26
A.1 Background. 26
A.2 Measurement protocol . 26
A.3 Test report . 29
Annex B (informative) Application examples . 33
B.1 General . 33
B.2 Conductance map of CVD graphene on quartz . 33
Annex C (informative) Theoretical background . 35
C.1 Reflection and transmission of plane electromagnetic waves . 35
C.2 Transmission coefficient through a thin, conductive film . 37
C.3 Sheet conductivity of a thin, conductive film . 39
C.3.1 Reflection-mode geometry . 40
C.3.2 Transmission-mode geometry . 41
Annex D (informative) Considerations for custom-built systems . 43
D.1 Linearity of the THz-TDS detection system . 43
D.2 Calibration of custom-built equipment . 43
Bibliography . 44
Figure 1 – Time trace of a typical THz waveform. . 12
Figure 2 – Sample scheme comprised of a thin film of graphene on a dielectric
substrate. . 12
Figure 3 – Principal components of a classical THz-TDS system. 14
Figure 4 – Comparison of different transmission geometries. . 15
Figure 5 – Comparison of different reflection geometries . 16
Figure 6 – Photograph of a CVD monolayer of graphene on PET substrate . 21
Figure 7 – THz-TDS conductance and resistance maps of the sample . 21
Figure 8 – Analysis of high conductive areas in the conductivity map . 22
Figure 9 – Analysis of low conductive areas in the conductivity map . 22
Figure 10 – Analysis of low resistance areas in the resistance map . 23
Figure 11 – Analysis of high resistance areas in the resistance map . 23
Figure 12 – Conductance maps at two different frequencies: 0,5 THz and 0,75 THz . 24
Figure A.1 – Colour map of sheet resistance results at the selected frequency. Sheet
resistance map of the wafer at 0.5 THz, with step size 1 mm. . 32
Figure B.1 – Photograph of a graphene film on a 100 mm quartz wafer and related
conductivity map . 33
Figure B.2 – Detailed view of subsections . 34
Figure C.1 – Reflection and transmission for a thin film on a substrate . 35
Figure C.2 – Reflection and transmission for a thin film on a substrate. . 40
Table A.1 – Illustration of measurement protocol . 26
Table A.2 – Product identification . 30
Table A.3 – General material description . 30
Table A.4 – Sampling plan . 31
Table A.5 – Measurement related information . 31
Table A.6 – Measurement results: Sheet resistance at the selected frequency . 32
– 4 – IEC TS 62607-6-10:2021 © IEC 2021
INTERNATIONAL ELECTROTECHNICAL COMMISSION
____________
NANOMANUFACTURING – KEY CONTROL CHARACTERISTICS –
Part 6-10: Graphene-based material – Sheet resistance:
Terahertz time-domain spectroscopy
FOREWORD
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