|
IEC TS 62607-6-6
Edition 1.0 2021-10
TECHNICAL
SPECIFICATION
colour
inside
Nanomanufacturing – Key control characteristics –
Part 6-6: Graphene – Strain uniformity: Raman spectroscopy
your local IEC member National Committee for further information.
IEC Central Office Tel.: +41 22 919 02 11
3, rue de
CH-1211 Geneva 20
Switzerland
About the IEC
The International Electrotechnical Commission (IEC) is the leading global organization that prepares and publishes
International Standards for all electrical, electronic and related technologies.
About IEC publications
The technical content of IEC publications is kept under constant review by the IEC. Please make sure that you have the
latest edition, a corrigendum or an amendment might have been published.
IEC publications search - webstore.iec.ch/advsearchform IEC online collection - oc.iec.ch
The advanced search enables to find IEC publications by a Discover our powerful search engine and read freely all the
variety of criteria (reference number, text, technical publications previews. With a subscription you will always have
committee, …). It also gives information on projects, replaced access to up to date content tailored to your needs.
and withdrawn publications.
Electropedia - www.electropedia.org
IEC Just Published - webstore.iec.ch/justpublished
The world's leading online dictionary on electrotechnology,
Stay up to date on all new IEC publications. Just Published
containing more than 22 000 terminological entries in English
details all new publications released. Available online and once
and French, with equivalent terms in 18 additional languages.
a month by email.
Also known as the International Electrotechnical Vocabulary
(IEV) online.
IEC Customer Service Centre - webstore.iec.ch/csc
If you wish to give us your feedback on this publication or need
further assistance, please contact the Customer Service
.
IEC TS 62607-6-6
Edition 1.0 2021-10
TECHNICAL
SPECIFICATION
colour
inside
Nanomanufacturing – Key control characteristics –
Part 6-6: Graphene – Strain uniformity: Raman spectroscopy
INTERNATIONAL
ELECTROTECHNICAL
COMMISSION
ICS 07.120 ISBN 978-2-8322-1033-5
– 2 – IEC TS 62607-6-6:2021 © IEC 2021
CONTENTS
FOREWORD . 4
INTRODUCTION . 6
1 Scope . 7
2 Normative references . 7
3 Terms and definitions . 7
3.1 General terms . 8
3.2 Key control characteristics . 8
3.3 Measurement related terms . 9
4 General introduction . 9
4.1 Measurement principle . 9
4.2 Sample preparation method . 10
4.3 Test equipment . 11
4.4 Calibration standards . 11
5 Measurement procedure . 12
5.1 Calibration of test equipment . 12
5.2 Description of the measurement procedure . 12
5.3 Measurement accuracy . 12
6 Data analysis/interpretation of results . 12
7 Sampling plan . 14
8 Test report . 14
Annex A (informative) Format of the test report . 15
Annex B (normative) Sampling plan . 17
B.1 General . 17
B.2 Sampling plan for circular substrates . 17
B.3 Sampling plan for square substrates . 18
B.4 Sampling plan for irregular substrates . 19
Annex C (informative) Recommendations for wavelengths depending on substrate . 20
Annex D (informative) Examples of Raman spectra of single-layer graphene on
different substrates . 21
−1
D.1 Example 1: FWHM(2D) = 16,6 cm – Graphene encapsulated in hexagonal
boron nitride . 21
−1
D.2 Example 2: FWHM(2D) = 22,3 cm – Graphene on SiO covered with hBN . 21
−1
D.3 Example 3: FWHM(2D) = 25,3 cm – Graphene on SiO . 22
−1
D.4 Example 4: FWHM(2D) = 34,8 cm – Graphene on SiO substrate covered
with hBN . 23
−1
D.5 Example 5: FWHM(2D) = 40,3 cm – Graphene on SiO covered with very
thin hBN . 23
Annex E (informative) Relation between observed Raman 2D linewidth and carrier
mobility . 25
Bibliography . 27
Figure 1 – Typical Raman spectra of an exfoliated graphene flake adopted from [6] . 10
Figure 2 – Schematic illustration of a confocal Raman setup . 11
Figure 3 – Example FWHM(2D) Raman map . 13
Figure 4 – Example FWHM(2D) histogram obtained from the Raman map in Figure 3 . 13
Figure B.1 – Sampling plan for circular substrates of diameter a . 17
Figure B.2 – Sampling plan for square substrates with edge length a . 18
Figure B.3 – Sampling plan for irregular substrates . 19
Figure D.1 – Spectrum of graphene encapsulated in hBN . 21
Figure D.2 – Spectrum of graphene on SiO covered with hBN . 22
Figure D.3 – Spectrum of graphene on SiO . 22
Figure D.4 – Spectrum of graphene on SiO covered with hBN . 23
Figure D.5 – Spectrum of graphene on SiO covered with hBN . 24
Figure E.1 – Relation of the inverse mobility and the average full width at half
maximum FWHM(2D) of the Raman 2D-peak . 26
Table A.1 – Sample identification . 15
Table A.2 – General material information . 15
Table A.3 – Test related information . 16
Table A.4 – Schematic of sample geometry/structure . 16
Table A.5 – Measured key control characteristic . 16
Table B.1 – Sampling plan for circular substrates . 18
Table B.2 – Sampling plan for square substrates . 18
Table C.1 – Laser wavelength recommendations . 20
– 4 – IEC TS 62607-6-6:2021 © IEC 2021
INTERNATIONAL ELECTROTECHNICAL COMMISSION
_____________
NANOMANUFACTURING –
KEY CONTROL CHARACTERISTICS –
Part 6-6: Graphene –
Strain uniformity: Raman spectroscopy
FOREWORD
1) The International Electrotechnical Commission (IEC) is a worldwide organization for standardization comprising
all national electrotechnical committees (IEC National Committees). The object of IEC is to promote international
co-operation on all questions concerning standardization in the electrical and electronic fields. To this end and
in addition to other activities, IEC publishes International Standards, Technical Specifications, Technical Reports,
Publicly Available Specifications (PAS) and Guides (hereafter referred to as "IEC Publication(s)"). Their
preparation is entrusted to technical committees; any IEC National Committee interested in the subject dealt with
may participate in this preparatory work. International, governmental and non-governmental organizations liaising
with the IEC also participate in this preparation. IEC collaborates closely with the International Organization for
Standardization (ISO) in accordance with conditions determined by agreement between the two organizations.
2) The formal decisions or agreements of IEC on technical matters express, as nearly as possible, an international
consensus of opinion on the relevant subjects since each technical committee has representation from all
interested IEC National Committees.
3) IEC Publications have the form of recommendations for international use and are accepted by IEC National
Committees in that sense. While all reasonable efforts are made to ensure that the technical content of IEC
Publications is accurate, IEC cannot be held responsible for the way in which they are used or for any
misinterpretation by any end user.
4) In order to promote international uniformity, IEC National Committees undertake to apply IEC Publications
transparently to the maximum extent possible in their national and regional publications. Any divergence between
any IEC Publication and the corresponding national or regional publication shall be clearly indicated in the latter.
5) IEC itself does not provide any attestation of conformity. Independent certification bodies provide conformity
assessment services and, in some areas, access to IEC marks of conformity. IEC is not responsible for any
services carried out by independent certification bodies.
6) All users should ensure that they have the latest edition of this publication.
7) No liability shall attach to IEC or its directors, employees, servants or agents including individual experts and
members of its technical committees and IEC National Committees for any personal injury, property damage or
other damage of any nature whatsoever, whether direct or indirect, or for costs (including legal fees) and
expenses arising out of the publication, use of, or reliance upon, this IEC Publication or any other IEC
Publications.
8) Attention is drawn to the Normative references cited in this publication. Use of the referenced publications is
indispensable for the correct application of this publication.
9) Attention is drawn to the possibility that some of the elements of this IEC Publication may be the subject of patent
rights. IEC shall not be held responsible for identifying any or all such patent rights.
IEC TS 62607-6-6 has been prepared by IEC technical committee 113: Nanotechnology for
electrotechnical products and systems. It is a Technical Specification.
The text of this Technical Specification is based on the following documents:
Draft Report on voting
113/579/DTS 113/605/RVDTS
Full information on the voting for its approval can be found in the report on voting indicated in
the above table.
The language used for the development of this Technical Specification is English.
This document was drafted in accordance with ISO/IEC Directives, Part 2, and developed in
accordance with ISO/IEC Directives, Part 1 and ISO/IEC Directives, IEC Supplement, available
at /members_experts/ref
...