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STANDARD 24173
Second edition
Microbeam analysis — Guidelines
for orientation measurement using
electron backscatter diffraction
Analyse par microfaisceaux — Lignes directrices pour la mesure
d'orientation par diffraction d'électrons rétrodiffusés
PROOF/ÉPREUVE
Reference number
ISO 24173:2023(E)
© ISO 2023
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ISO 24173:2023(E)
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© ISO 2023
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Published in Switzerland
ii
PROOF/ÉPREUVE © ISO 2023 – All rights reserved
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ISO 24173:2023(E)
Contents Page
Foreword .iv
Introduction .v
1 Scope . 1
2 Normative references . 1
3 Terms and definitions . 1
4 Equipment for EBSD.6
5 Operating conditions . 7
5.1 Specimen preparation . 7
5.2 Specimen alignment. 7
5.3 Common steps in collecting an EBSP . 8
5.3.1 Setting the microscope operating conditions . 8
5.3.2 Detector and working distances . 8
5.3.3 Camera integration/exposure time . 9
5.3.4 Binning . 9
5.3.5 EBSP averaging . 10
5.3.6 EBSP background correction/EBSP signal correction . 10
5.3.7 Band detection . 10
6 Calibrations required for indexing of EBSPs .12
7 Analytical procedure .15
7.1 Operating conditions .
...