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Standard
ISO 18118
Third edition
Surface chemical analysis — Auger
2024-02
electron spectroscopy and X-ray
photoelectron spectroscopy —
Guide to the use of experimentally
determined relative sensitivity
factors for the quantitative analysis
of homogeneous materials
Analyse chimique des surfaces — Spectroscopie des électrons
Auger et spectroscopie de photoélectrons — Lignes directrices
pour l'utilisation de facteurs expérimentaux de sensibilité relative
pour l'analyse quantitative de matériaux homogènes
Reference number
ISO 18118:2024(en) © ISO 2024
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ISO 18118:2024(en)
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© ISO 2024 – All rights reserved
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ISO 18118:2024(en)
Contents Page
Foreword .iv
Introduction .v
1 Scope . 1
2 Normative references . 1
3 Terms and definitions . 1
4 Symbols and abbreviated terms. 4
5 General information . 5
6 Measurement conditions . 6
6.1 General .6
6.2 Excitation source .7
6.3 Energy resolution .7
6.4 Energy step and scan rate .7
6.5 Signal intensity . .7
6.6 Gain and time constant (for AES instruments with analogue detection systems) .7
6.7 Modulation to generate a derivative spectrum .7
7 Data-analysis procedures . 7
8 Spectrometer response function .
...