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SLOVENSKI STANDARD
01-januar-2023
Elipsometrija - Načela (ISO 23131:2021)
Ellipsometry - Principles (ISO 23131:2021)
Ellipsometrie - Grundlagen (ISO 23131:2021)
Ellipsométrie - Principes (ISO 23131:2021)
Ta slovenski standard je istoveten z: EN ISO 23131:2022
ICS:
17.020 Meroslovje in merjenje na Metrology and measurement
splošno in general
2003-01.Slovenski inštitut za standardizacijo. Razmnoževanje celote ali delov tega standarda ni dovoljeno.
EN ISO 23131
EUROPEAN STANDARD
NORME EUROPÉENNE
November 2022
EUROPÄISCHE NORM
ICS 17.020
English Version
Ellipsometry - Principles (ISO 23131:2021)
Ellipsométrie - Principes (ISO 23131:2021) Ellipsometrie - Grundlagen (ISO 23131:2021)
This European Standard was approved by CEN on 30 October 2022.
CEN members are bound to comply with the CEN/CENELEC Internal Regulations which stipulate the conditions for giving this
European Standard the status of a national standard without any alteration. Up-to-date lists and bibliographical references
concerning such national standards may be obtained on application to the CEN-CENELEC Management Centre or to any CEN
member.
This European Standard exists in three official versions (English, French, German). A version in any other language made by
translation under the responsibility of a CEN member into its own language and notified to the CEN-CENELEC Management
Centre has the same status as the official versions.
CEN members are the national standards bodies of Austria, Belgium, Bulgaria, Croatia, Cyprus, Czech Republic, Denmark, Estonia,
Finland, France, Germany, Greece, Hungary, Iceland, Ireland, Italy, Latvia, Lithuania, Luxembourg, Malta, Netherlands, Norway,
Poland, Portugal, Republic of North Macedonia, Romania, Serbia, Slovakia, Slovenia, Spain, Sweden, Switzerland, Türkiye and
United Kingdom.
EUROPEAN COMMITTEE FOR STANDARDIZATION
COMITÉ EUROPÉEN DE NORMALISATION
EUROPÄISCHES KOMITEE FÜR NORMUNG
CEN-CENELEC Management Centre: Rue de la Science 23, B-1040 Brussels
© 2022 CEN All rights of exploitation in any form and by any means reserved Ref. No. EN ISO 23131:2022 E
worldwide for CEN national Members.
Contents Page
European foreword . 3
European foreword
The text of ISO 23131:2021 has been prepared by Technical Committee ISO/TC 107 "Metallic and other
inorganic coatings” of the International Organization for Standardization (ISO) and has been taken over
as EN ISO 23131:2022 by Technical Committee CEN/TC 262 “Metallic and other inorganic coatings,
including for corrosion protection and corrosion testing of metals and alloys” the secretariat of which is
held by BSI.
This European Standard shall be given the status of a national standard, either by publication of an
identical text or by endorsement, at the latest by May 2023, and conflicting national standards shall be
withdrawn at the latest by May 2023.
Attention is drawn to the possibility that some of the elements of this document may be the subject of
patent rights. CEN shall not be held responsible for identifying any or all such patent rights.
Any feedback and questions on this document should be directed to the users’ national standards body.
A complete listing of these bodies can be found on the CEN website.
According to the CEN-CENELEC Internal Regulations, the national standards organizations of the
following countries are bound to implement this European Standard: Austria, Belgium, Bulgaria,
Croatia, Cyprus, Czech Republic, Denmark, Estonia, Finland, France, Germany, Greece, Hungary, Iceland,
Ireland, Italy, Latvia, Lithuania, Luxembourg, Malta, Netherlands, Norway, Poland, Portugal, Republic of
North Macedonia, Romania, Serbia, Slovakia, Slovenia, Spain, Sweden, Switzerland, Türkiye and the
United Kingdom.
Endorsement notice
The text of ISO 23131:2021 has been approved by CEN as EN ISO 23131:2022 without any modification.
INTERNATIONAL ISO
STANDARD 23131
First edition
2021-04
Ellipsometry — Principles
Ellipsométrie — Principes
Reference number
ISO 23131:2021(E)
©
ISO 2021
ISO 23131:2021(E)
© ISO 2021
All rights reserved. Unless otherwise specified, or required in the context of its implementation, no part of this publication may
be reproduced or utilized otherwise in any form or by any means, electronic or mechanical, including photocopying, or posting
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below or ISO’s member body in the country of the requester.
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ii © ISO 2021 – All rights reserved
ISO 23131:2021(E)
Contents Page
Foreword .iv
Introduction .v
1 Scope . 1
2 Normative references . 1
3 Terms, definitions, symbols and abbreviated terms . 1
3.1 Terms and definitions . 1
3.2 Symbols and abbreviated terms. 1
4 Experimental boundary conditions with respect to the sample . 2
5 Experimental boundary conditions with respect to the measurement .3
6 Model-correlated boundary conditions of the simulation. 4
7 Basic models . 4
7.1 General . 4
7.2 Bulk material (case 1 of application) . 5
7.3 Transparent single layer (case 2 of application) . 5
7.4 Semi-transparent single layer (case 3 of application) . 5
7.5 Multiple layers and periodic layers (case 4 of application) . 5
7.6 Effective materials (case 5 of application) . 5
8 Raw data . 5
9 Verification of correct adjustment of the device . 5
9.1 Straight line measurement . 5
9.2 Simple measurement of angles . 6
9.2.1 Measurement on a known sample, e.g. SiO /Si, with fitting of the angle of
incidence . 6
9.2.2 Measurement of the Brewster’s angle of water, of a solvent or of technical glass . 8
10 Verification of the device regarding correct calibration . 9
11 Test report . 9
Annex A (informative) Mathematical and physical principles of ellipsometry.10
Bibliography .15
ISO 23131:2021(E)
Foreword
ISO (the International Organization for Standardization) is a worldwide federation of national standards
bodies (ISO member bodies). The work of preparing International Standards is normally carried out
through ISO technical committees. Each member body interested in a subject for which a technical
committee has been established has the right to be represented on that committee. International
organizations, governmental and non-governmental, in liaison with ISO, also take part in the work.
ISO collaborates closely with the International Electrotechnical Commission (IEC) on all matters of
electrotechnical standardization.
The procedures used to develop this document and those intended for its further maintenance are
described in the ISO/IEC Directives, Part 1. In particular, the different approval criteria needed for the
different types of ISO documents should be noted. This document was drafted in accordance with the
editorial rules of the ISO/IEC Directives, Part 2 (see www .iso .org/ directives).
Attention is drawn to the possibility that some of the elements of this document may be the subject of
patent rights. ISO shall not be held responsible for identifying any or all such patent rights. Details of
any patent rights identified during the development of the document will be in the Introduction and/or
on the ISO list of patent declarations received (see www .iso .org/ patents).
Any trade name used in this document is information given for the convenience of users and does not
constitute an endorsement.
For an explanation of the voluntary nature of standards, the meaning of ISO specific terms and
expressions related to conformity assessment, as well as information about ISO’s adherence to the
World Trade Organization (WTO) principles in the Technical Barriers to Trade (TBT), see www .iso .org/
iso/ foreword .html.
This document was prepared by Technical Committee ISO/TC 107, Metallic and other inorganic coatings.
Any feedback or questions on this document should be directed to the user’s national standards body. A
complete listing of these bodies can be found at www .iso .org/ members .html.
iv © ISO 2021 – All rights reserved
ISO 23131:2021(E)
Introduction
The ellipsometry measuring method is a phase-sensitive reflection technique using polarized light in
the optical far-field. Over a long time, ellipsometry has been established as a non-invasive measuring
method in the field of semiconductor technology — especially within the integrated production — in
the first instance as a single-wavelength, then as a multiple-wavelength and later as a spectroscopic
measuring method.
By means of ellipsometry, optical or dielectric constants of any material as well as the layer thicknesses
of at least semi-transparent layers or layer systems can be determined. Ellipsometry is an indirect
measuring method, the analysis of which is based on model optimization. The measurands, which differ
according to the procedural principle, are converted into the ellipsometric factors Ψ (Psi, amplitude
information) and Δ (Delta, phase information), based on which the physical target figures of interest
(optical or dielectric constants, layer thicknesses) will then be determined by means of a parameterized
fit.
Ellipsometry shows a high precision regarding the ellipsometric transfer quantities Ψ and Δ, which can
be equivalent to a layer thickness sensitivity of 0,1 nm for ideal layer substrate systems. As a result,
the measuring method can verify even the slightest discrepancies in the surface characteristics.
This is closely linked to the homogeneity and the isotropy of the material surface. In order to achieve
high precision, carrying out measurements at the exact same measuring point is a prerequisite for
inhomogeneous materials. The same applies to the orientation of the incident plane relative to the
material surface for anisotropic materials.
The absolute accuracy, e.g. of layer thickness values, substantially depends on the quality of the
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