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STANDARD
SIST EN 1012-2:2001+A1:2009
EUROPEAN STANDARD NORME EUROPÉENNE EUROPÄISCHE NORM
EN 1012-2:1996+A1
September 2009 ICS 23.140; 23.160 Supersedes EN 1012-2:1996English Version
Compressors and vacuum pumps - Safety requirements - Part 2: Vacuum pumps
Compresseurs et pompes à vide - Prescriptions de sécurité - Partie 2: Pompes à vide
Kompressoren und Vakuumpumpen - Sicherheitsanforderungen - Teil 2: Vakuumpumpen This European Standard was approved by CEN on 13 March 1996 and includes Amendment 1 approved by CEN on 6 August 2009.
CEN members are bound to comply with the CEN/CENELEC Internal Regulations which stipulate the conditions for giving this European Standard the status of a national standard without any alteration. Up-to-date lists and bibliographical references concerning such national standards may be obtained on application to the CEN Management Centre or to any CEN member.
This European Standard exists in three official versions (English, French, German). A version in any other language made by translation under the responsibility of a CEN member into its own language and notified to the CEN Management Centre has the same status as the official versions.
CEN members are the national standards bodies of Austria, Belgium, Bulgaria, Cyprus, Czech Republic, Denmark, Estonia, Finland, France, Germany, Greece, Hungary, Iceland, Ireland, Italy, Latvia, Lithuania, Luxembourg, Malta, Netherlands, Norway, Poland, Portugal, Romania, Slovakia, Slovenia, Spain, Sweden, Switzerland and United Kingdom.
EUROPEAN COMMITTEE FOR STANDARDIZATION
COMITÉ EUROPÉEN DE NORMALISATION EUROPÄISCHES KOMITEE FÜR NORMUNG
Management Centre:
Avenue Marnix 17,
B-1000 Brussels © 2009 CEN All rights of exploitation in any form and by any means reserved worldwide for CEN national Members. Ref. No. EN 1012-2:1996+A1:2009: ESIST EN 1012-2:2001+A1:2009
EN 1012-2:1996+A1:2009 (E) 2 Contents Page Foreword .4!!!!Introduction"""" .41Scope .52Normative references .53Definitions .64List of Hazards Specific to Vacuum Pumps .84.1Mechanical Hazards .84.2Electrical Hazards .94.3Thermal hazards . 104.4Hazards generated by noise . 104.5Hazards generated by radiation . 104.6Hazards generated by material and substances processed, used or exhausted by vacuum pumps . 104.7Hazards generated by neglecting ergonomic principles in design . 114.8Hazards caused by failure of energy supply, breaking down of parts or other functional disorders . 114.9Hazards caused by missing or incorrectly positioned safety related measures and means . 115Safety requirements and measures . 115.1Mechanical safety . 125.2Electrical Safety . 135.3Thermal Safety . 145.4Noise . 155.5Radiation . 155.6Materials and substances processed, used or exhausted by vacuum pumps . 155.7Ergonomic principles in machine design . 165.8Failure of energy supply, breaking down of machinery parts and other functional disorders . 175.9Safety related measures and means. 175.10Emergency stops . 176Marking, signs and warnings . 186.1Generally applicable . 186.2Data plate . 186.3Additional requirements . 186.4A vacuum pumping system shall be marked with additional information on vacuum systems. . 197Information for use . 197.1General . 197.2Transport and Storage . 207.3Installation . 207.4Product description . 217.5Use . 217.6Maintenance . 228Verification . 238.1Noise measurement . 238.2Pressure test . 238.3Mechanical stability testing . 238.4Testing for leak tightness . 23SIST EN 1012-2:2001+A1:2009
EN 1012-2:1996+A1:2009 (E) 3 8.5Structure of verification . 25Annex A (normative)
Labels, signs and warnings. 26Annex ZA (informative)
!!!!Relationship between this European Standard and the Essential Requirements of EU Directive 98/37/EC"""" . 31Annex ZB (informative)
!!!!Relationship between this European Standard and the Essential Requirements of EU Directive 2006/42/EC"""" . 32 SIST EN 1012-2:2001+A1:2009
EN 1012-2:1996+A1:2009 (E) 4 Foreword This document (EN 1012-2:1996+A1:2009) has been prepared by Technical Committee CEN/TC 232 “Compressors, vacuum pumps and their systems”, the secretariat of which is held by SIS. This European Standard shall be given the status of a national standard, either by publication of an identical text or by endorsement, at the latest by March 2010, and conflicting standards shall be withdrawn at the latest by March 2010. This document includes Amendment 1, approved by CEN on 2009-08-06. This document supersedes EN 1012-2:1996. The start and finish of text introduced or altered by amendment is indicated in the text by tags !". This European Standard has been prepared under a mandate given to CEN by the European Commission and the European Free Trade Association, and supports essential requirements of EU Directive(s). !For relationship with EU Directive(s), see informative Annexes ZA and ZB, which are integral parts of this document." The responsibility of CEN/TC 232 includes coordination of safety standards with CEN/TC 182 "Refrigerating systems, safety and environmental requirements" and CEN/TC 234 "Gas supply". !Annexes A, ZA and ZB to this draft European Standard are informative." This standard is divided in two parts: EN 1012-1 Compressors EN 1012-2 Vacuum Pumps According to the CEN/CENELEC Internal Regulations, the national standards organizations of the following countries are bound to implement this European Standard: Austria, Belgium, Bulgaria, Cyprus, Czech Republic, Denmark, Estonia, Finland, France, Germany, Greece, Hungary, Iceland, Ireland, Italy, Latvia, Lithuania, Luxembourg, Malta, Netherlands, Norway, Poland, Portugal, Romania, Slovakia, Slovenia, Spain, Sweden, Switzerland and United Kingdom. !!!!Introduction This document is a type C standard as stated in EN ISO 12100. The machinery concerned and the extent to which hazards, hazardous situations and hazardous events are covered are indicated in the scope of this document. When provisions of this type C standard are different from those which are stated in type A or B standards, the provisions of this type C standard take precedence over the provisions of the other standards, for machines that have been designed and built according to the provisions of this type C standard." SIST EN 1012-2:2001+A1:2009
EN 1012-2:1996+A1:2009 (E) 5 1 Scope This standard is applicable to all vacuum pumps, vacuum pump combinations and vacuum pumping systems. The standard lists the significant hazards associated with vacuum pumps and specifies safety requirements applicable to the design, installation, operation, maintenance and dismantling of vacuum pumps during their foreseeable life and subsequent disposal. The scope does not include pumps designed to pump continuously on open systems where the pump inlet pressure is above 75 kPA (750 mbar) absolute, i.e. vacuum cleaners, ventilation fans). Vacuum pumps intended for use in special applications shall also comply with any specific standards relating to those applications. 2 Normative references This European Standard incorporates by dated or undated reference, provisions from other publications. These normative references are cited at the appropriate places in the text and the publications are listed hereafter. For dated references, subsequent amendments to or revisions of any of these publications apply to this European Standard only when they are incorporated in it by amendment or revision. For undated references the latest edition of the publication referred to applies. !deleted text" EN 294:1992, Safety of machinery – Safety distances to prevent danger zones being reached by the upper limbs. EN 418, Safety of machinery – Emergency stop equipment – Functional aspects EN 563, Temperatures of touchable surfaces – Ergonomics data to establish temperature limit values for hot surfaces EN 953, Safety of machinery – Guarding of machinery – Fixed and moveable guards. EN 1127-1, Safety of machinery – Fires and explosions – Part 1: Explosion prevention !deleted text" EN 50 014, Electrical apparatus for potentially explosive atmospheres – General requirements EN 50 081-2, Electro-magnetic compatibility – Generic emission – Part 2: Industrial environment EN 50 082-2, Electro-magnetic compatibility – Generic immunity – Part 2: Industrial environment EN 61310-1, Safety of machinery – Indication, marking and actuation – Part 1: Requirements for visual, auditory and tactile signal (IEC 1310-1:1995) EN 60204-1:1992, Electrical equipment of industrial machines – Part 1: General requirements EN 60529, Degrees of protection provided by enclosures ENV 1070, Safety of machinery – Terminology !EN ISO 2151, Acoustics – Noise test code for compressors and vacuum pumps – Engineering method (Grade 2) (ISO 2151:2004)" !EN ISO 12100-2:2003, Safety of machinery – Basic concepts, general principles for design – Part 2: Technical principles (ISO 12100-2:2003)" SIST EN 1012-2:2001+A1:2009
EN 1012-2:1996+A1:2009 (E) 6 ISO 3266, Eyebolts for lifting purposes ISO 3529, Vacuum Technology – Vocabulary ISO 4126-1, Safety valves – Part 1: General Requirements ISO 4871, Acoustics – Declaration and verification of noise emission values of machinery and equipment ISO 7000, Graphical symbols for use on equipment – Index and synopsis ISO/TR 11688-1, Acoustics – Recommended practice for the design of low-noise machinery and equipment – Part 1: Planning IEC 417, Graphical symbols for use on equipment !IEC 61010-1", Safety requirements for electrical equipment for measurement, control and laboratory use – Part 1: General requirements
3 Definitions For the purposes of this standard the definitions given in ENV 1070 and ISO 3529 apply. Definitions specifically needed for this standard are added below. 3.1 vacuum an environment where the total pressure is below the prevailing atmospheric level. NOTE Vacuum is usually measured as the absolute pressure of the residual gas expressed as Pascals (Pa) or millibar (mbar). 1 mbar = 100 Pa. 3.2 vacuum pump device for creating, improving and/or maintaining a vacuum. NOTE Terms "vacuum pump" and "pump" have the same meaning throughout this standard. 3.3 pump inlet port by which gas to be pumped enters the pump 3.4 pump outlet outlet or discharge port of a pump 3.5 maximum starting pressure maximum inlet pressure at which the vacuum pump may be started 3.6 maximum outlet pressure maximum pressure at the vacuum pump outlet specified by the manufacturer SIST EN 1012-2:2001+A1:2009
EN 1012-2:1996+A1:2009 (E) 7 3.7 throughput of a vacuum pump quantity of gas flowing through the inlet of the vacuum pump, usually expressed as a pressure quantity product per unit time interval 3.8 pumped media all the substances which enter the vacuum pump i.e. gases, vapours, liquid mists and entrained solid particles 3.9 pump fluid fluid essential for the operation of a vacuum pump 3.10 primary pump pump that has a maximum outlet pressure equal or greater than ambient pressure 3.11 secondary pump pump which has a maximum starting pressure or a maximum outlet pressure which is less than atmospheric pressure or is only efficient at lower pressures and is intended to operate in conjunction with a primary pump to produce pressures lower than could be achieved by the primary pump alone 3.12 pumping system pump or a combination of pumps fitted with accessories for the sole purpose of producing a vacuum. The accessories could include pipework, valves, filters, coolers, control devices and any other equipment required to meet performance requirements 3.13 positive displacement pump vacuum pump in which a volume filled with gas is cyclically isolated from the inlet, the gas being then transferred to an outlet 3.14 vapour pump vacuum pump in which gases are pumped by molecular collision with and/or entrainment by a high speed directional vapour stream and driven to the pump outlet (e.g. Vapour Diffusion Pumps and Vapour Diffusion Ejector Pumps) 3.15 cryogenic entrapment pump vacuum pump in which the pumped media is either condensed on a surface refrigerated to a very low temperature (less than 120 K) or is retained by adsorption using a porous medium of large effective area maintained at cryogenic temperature (e.g. Cryopumps and Adsorption Pumps). The term "cryogenic temperature" is used in the text for temperatures less than 120 K. 3.16 getter pump pumps in which the gas is retained principally by chemical combination with a getter. The getter is usually a metal or metal alloy either in bulk (volume getter pump) or is sublimated (sublimation pump) or is dispersed by cathodic sputtering (sputter ion pump) 3.17 molecular pump vacuum pumps in which the pumping action is achieved by a high speed rotor imparting momentum to gas molecules causing them to move towards the outlet of the pump (e.g. Molecular Drag Pumps and Turbomolecular Pumps) SIST EN 1012-2:2001+A1:2009
EN 1012-2:1996+A1:2009 (E) 8 3.18 maximum allowable working pressure maximum operating pressure which the manufacturer specifies 3.19 minimum allowable working pressure minimum operating pressure which the manufacturer specifies 3.20 baking process of heating a vacuum system to accelerate, for instance, the removal of unwanted substances from the surfaces within the system and enable a low pressure to be achieved 3.21 methane drain pump positive displacement pump used for the extraction of methane from mines, landfill sites and environments where the presence of methane is a hazard 4 List of Hazards Specific to Vacuum Pumps 4.1 Mechanical Hazards
Reference to safety requirement 4.1.1 Generally applicable
a) Cutting and severing due to contact with moving parts such as drive belts, cooling fans, couplings, shafts and rotors; 5.1.1 b) Cutting and severing due to sharp edges such as sheet metal parts, crimped tubes and turbine blades; 5.1.1 and 5.1.4 c) Drawing in to a vacuum system; 5.1.1 d) Ejection of parts caused by implosion of any part of the pump or pumping system; 5.1.1 e) Ejection of parts caused by bursting of the vacuum system due to excess pressure caused by: the incorrect direction rotation of the vacuum pump, a blocked or restricted exhaust, the faulty operation of a gas input to the vacuum system, mechanical failure of components, the reverse rotation of a pump when switched off under vacuum;5.1.1 and 7.3.1 f) Loss of stability when adding or removing accessories; 5.1.1 g) Loss of stability during transportation; 5.1.1 h) Loss of stability during lifting due to lack of lifting facilities; 5.1.1 SIST EN 1012-2:2001+A1:2009
EN 1012-2:1996+A1:2009 (E) 9 i) Slip, trip or fall resulting from oil leakage; 5.1.1 4.1.2 Applicable to vapour pumps Ejection of parts due to a pressure rise caused by operating a vapour pump at atmospheric pressure, without cooling and with its inlet and outlet valves closed. 5.1.2 4.1.3 Applicable to cryogenic entrapment pumps Ejection of parts due to the bursting of a cryogenic entrapment pump caused by: release of entrapped pumped media into a sealed system; excessive pressure generated when cold high pressure refrigerant is allowed to warm up in a sealed system; excessive pressure generated when a container of refrigerant at high pressure is exposed to fire; the cryogenic failure of materials used in its construction. 5.1.3 4.1.4 Applicable to getter pumps Trapping of fingers when handling strong magnets. 7.3.1 4.1.5 Applicable to Molecular Pumps a) Ejection of the moving rotor assembly from a turbomolecular pump; b) Ejection of high energy fragments resulting from disintegration of the high speed rotor of a turbomolecular pump; c) Loss of stability of a molecular pump caused by the rotor becoming unbalanced or decelerating suddenly. 5.1.5 4.2 Electrical Hazards 5.2.1 4.2.1 Generally applicable electrical contact direct or indirect, electrostatic phenomena, external influences on electrical equipment. 5.2.1 4.2.2 Applicable to vapour pumps High electrical leakage current caused by the absorption of moisture by mineral insulated heater elements. 5.2.2 4.2.3 Applicable to getter pumps 5.2.3 SIST EN 1012-2:2001+A1:2009
EN 1012-2:1996+A1:2009 (E) 10 Contact with Extra High Voltage supply to a getter pump due to: disconnecting the pump from its power supply before switching off the supply and, if appropriate, without discharging stored energy; failure of insulation caused by excessive baking temperatures or mechanical damage. 4.3 Thermal hazards a) Burns due to contact with hot surfaces. b) Burns due to contact with very cold surfaces, cold pumped media or cold refrigerant gas. c) Scalds due to contact with hot pump fluids or lubricants. 5.3.1, 5.3.2 4.4 Hazards generated by noise Hearing losses caused by high noise level. 5.4.1 4.5 Hazards generated by radiation Exposure to ionising radiation produced by a getter pump. 5.5.1 4.6 Hazards generated by material and substances processed, used or exhausted by vacuum pumps
4.6.1 Generally applicable a) Hazards resulting from exhausting of toxic gases or vapours being processed; b) Hazards resulting from inhalation of concentrations of oil mist from the exhaust of an oil sealed pump; c) Hazards resulting from any contact during pump maintenance with toxic breakdown/reaction products of lubricants, pump fluids or pumped media; d) Fire or explosion resulting from processing or exhausting flammable gases and vapours; e) Fire or explosion resulting from processing or exhausting oxidants; f) Fire or explosion resulting from processing pyrophoric gases; g) Fire resulting from the degradation of lubricating oil at high temperatures; h) Hazard resulting from a violent increase in pressure due to the decomposition of a pumped gas.
5.6.1
5.6.1
7.6.2
5.6.1
5.6.1
5.6.1
5.6.1
5.6.1
SIST EN 1012-2:2001+A1:2009
EN 1012-2:1996+A1:2009 (E) 11 4.6.2 Applicable to vapour pumps Hazards resulting from contact or inhalation of toxic chemical breakdown products of pump fluids exposed to excessive temperature. 5.6.2 4.6.3 Applicable to cryogenic entrapment pumps Hazards resulting from contact or inhalation of toxic materials released by a cryogenic entrapment pump during warm up or maintenance. 5.6.3
4.7 Hazards generated by neglecting ergonomic principles in design a) Neglected use of personal protection equipment; b) Human errors resulting from poor positioning of controls and instruments; c) Hazards caused by incorrectly connecting a pump to the system to be pumped.
5.7 5.7 6.3, 7.3.1 4.8 Hazards caused by failure of energy supply, breaking down of parts or other functional disorders a) Failure of energy supply; b) Failure or disorder of central control system (unexpected start up); c) Errors of fitting.
5.8.1
4.9 Hazards caused by missing or incorrectly positioned safety related measures and means a) Hazards that may occur should a pump restart of its own accord after being shut down due to a fault condition; b) Hazard resulting from error in programming a process sequence; c) Hazard resulting from a software error; d) Hazard resulting from a computer component failure. 5.9 5.10
5 Safety requirements and measures !Vacuum pumps shall comply with the safety requirements and/or protective measures of this clause. In addition, they shall be designed according to the principles of EN ISO 12100-2:2003 for relevant but not significant hazards, which are not dealt with by this document." SIST EN 1012-2:2001+A1:2009
EN 1012-2:1996+A1:2009 (E) 12 5.1 Mechanical safety 5.1.1 General requirements a) Contact with moving parts shall be prevented by the use of guards in accordance with EN 953. A guard shall be considered adequate if it prevents contact with the moving part using the Test Finger of EN 60 529, (see EN 294). b) All accessible edges and corners shall be radiused to avoid injury. c) If final guarding is only achievable on installation to the vacuum system, temporary guards shall be provided (e.g. where the pump mechanism is accessible through the pump inlet, the inlet shall be covered). d) Evacuated parts shall be strong enough to prevent implosion during the life of the equipment. Where the risk of such damage cannot be eliminated, implosion guards shall be provided to contain any ejected material. e) The design shall be such that blockage or restriction due to any accumulation of debris from the pumped media shall not cause a hazard. Exhaust filters shall have sufficient capacity to allow the pump to operate safely at maximum throughput. Means shall be provided to ensure that saturation or blockage of the filter element cannot result in the maximum allowable working pressure being exceeded. Where the process is such that accumulation of debris in the outlet of a pump or pumping system is unavoidable, outlet pressure monitoring devices or a pressure relief valve shall be provided. f) Vacuum pumping systems shall be designed to be stable. The test for stability is described in clause 8.3. Consideration shall be given to any accessories that could be added by the user of the equipment. Where the test requirement cannot be achieved, means shall be provided for adequately securing the system. g) The means of safe handling shall be provided or specified for vacuum pumps and vacuum pumping systems. Facilities used may include handles, eyebolts, wheels, lugs or brackets. Eyebolts shall be in accordance with ISO 3266. h) Steps shall be taken to minimise the possibility of oil leaking from the pump. 5.1.2 Requirements for vapour pumps (additional) The system design shall ensure that no hazard is created if the pump is operated at atmospheric pressure with its inlet and outlet closed. 5.1.3 Requirements for cryogenic entrapment pumps (additional) a) To prevent explosion of the pump if pumped media is released into a sealed pumping system a suitable pressure relief device shall be incorporated into the pump body. The pressure relief device shall meet the requirements of ISO 4126-1, but in addition shall be suitable for operation at cryogenic temperatures. SIST EN 1012-2:2001+A1:2009
EN 1012-2:1996+A1:2009 (E) 13 b) To avoid material failure resulting from stress caused by thermal cycling or embrittlement at low temperature, all materials used in construction of the pump shall have suitable mechanical properties for their intended duty. c) All containers and vessels containing pressurised gas shall be designed and manufactured to an appropriate recognised code of practice. d) If a fault condition can occur which can cause any part to be subjected to a pressure in excess of its maximum allowable working pressure then suitable pressure relief devices shall be provided. e) If a disconnection of a cold pump from its refrigerant compressor can create a pressure hazard a facility shall be provided for venting the pressure system to a safe pressure level and instructions provided for its safe use. 5.1.4 Requirements for getter pumps (additional) Crimp off connections shall be suitably protected and a warning given of the sharp edge. 5.1.5 Requirements for molecular pumps (additional) The mounting of the rotor shall be strong enough to prevent the rotor being unintentionally released from the pump. The enclosure of the pump shall be strong enough to retain the fragments of a disintegrating rotor. A means shall be provided which allows the securing of the pump to a system which is strong enough to withstand a sudden seizure of the rotor. 5.2 Electrical Safety 5.2.1 General requirements a) Electrical installation The electrical installation of a vacuum pump shall fulfil the requirements of !IEC 61010-1" or EN 60204-1. Protection devices and switches shall be so designed and connected as to fulfil the requirements of "fail safe". The over-current protection of the power circuit may be installed outside the vacuum pump enclosure on site. In such a case the Instruction Manual shall state that the user has to make provisions for the installation of the over-current pr
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