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STANDARD 21360-6
First edition
2023-12
Vacuum technology — Standard
methods for measuring vacuum-pump
performance —
Part 6:
Cryogenic vacuum pumps
Technique du vide — Méthodes normalisées pour mesurer les
performances des pompes à vide —
Partie 6: Pompes à vide cryogéniques
Reference number
ISO 21360-6:2023(E)
© ISO 2023
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ISO 21360-6:2023(E)
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© ISO 2023
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Published in Switzerland
ii
© ISO 2023 – All rights reserved
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ISO 21360-6:2023(E)
Contents Page
Foreword .iv
Introduction .v
1 Scope . 1
2 Normative references . 1
3 Terms and definitions . 1
4 Symbols . 2
5 Test methods . 3
5.1 Test gas . 3
5.2 Measurement of the volume flow rate (pumping speed) . 3
5.2.1 General . 3
5.2.2 Pretreatment procedure . 3
5.2.3 Volume flow rate (pumping speed) measurement by the throughput method . 3
5.2.4 Volume flow rate (pumping speed) measurement by the orifice method . 3
5.2.5 Measurement of water vapour volume flow rate (pumping speed) . 4
5.3 Maximum throughput measurement . 4
5.3.1 General . 4
5.3.2 Measurement method . 4
5.3.3 Measurement setup . 4
5.3.4 Measuring procedure . 4
5.4 Pumping capacity measurement . 4
5.4.1 General .
...