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TECHNICAL ISO/TS
SPECIFICATION 80004-8
Second edition
2020-11
Nanotechnologies — Vocabulary —
Part 8:
Nanomanufacturing processes
Nanotechnologies — Vocabulaire —
Partie 8: Processus de nanofabrication
Reference number
ISO/TS 80004-8:2020(E)
©
ISO 2020
ISO/TS 80004-8:2020(E)
© ISO 2020
All rights reserved. Unless otherwise specified, or required in the context of its implementation, no part of this publication may
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ii © ISO 2020 – All rights reserved
ISO/TS 80004-8:2020(E)
Contents Page
Foreword .iv
Introduction .v
1 Scope . 1
2 Normative references . 1
3 Terms and definitions . 1
4 Terms related to general aspects . 3
5 Terms related to directed assembly . 4
6 Terms related to self-assembly processes . 5
7 Terms related to synthesis . 6
7.1 Gas process phase — Physical methods . 6
7.2 Gas process phase — Chemical methods . 7
7.2.1 Flame synthesis processes . 7
7.2.2 Other terms . 8
7.3 Liquid process phase — Physical methods . 8
7.4 Liquid process phase — Chemical methods . 9
7.5 Solid process phase — Physical methods .10
7.6 Solid process phase — Chemical methods .12
8 Terms related to fabrication .12
8.1 Nanopatterning lithography .12
8.2 Deposition processes .16
8.3 Etching processes .18
8.4 Printing and coating .21
Annex A (informative) Identification of output resulting from defined synthesis processes .22
Bibliography .25
Index .26
ISO/TS 80004-8:2020(E)
Foreword
ISO (the International Organization for Standardization) is a worldwide federation of national standards
bodies (ISO member bodies). The work of preparing International Standards is normally carried out
through ISO technical committees. Each member body interested in a subject for which a technical
committee has been established has the right to be represented on that committee. International
organizations, governmental and non-governmental, in liaison with ISO, also take part in the work.
ISO collaborates closely with the International Electrotechnical Commission (IEC) on all matters of
electrotechnical standardization.
The procedures used to develop this document and those intended for its further maintenance are
described in the ISO/IEC Directives, Part 1. In particular, the different approval criteria needed for the
different types of ISO documents should be noted. This document was drafted in accordance with the
editorial rules of the ISO/IEC Directives, Part 2 (see www .iso .org/ directives).
Attention is drawn to the possibility that some of the elements of this document may be the subject of
patent rights. ISO shall not be held responsible for identifying any or all such patent rights. Details of
any patent rights identified during the development of the document will be in the Introduction and/or
on the ISO list of patent declarations received (see www .iso .org/ patents).
Any trade name used in this document is information given for the convenience of users and does not
constitute an endorsement.
For an explanation of the voluntary nature of standards, the meaning of ISO specific terms and
expressions related to conformity assessment, as well as information about ISO’s adherence to the
World Trade Organization (WTO) principles in the Technical Barriers to Trade (TBT), see www .iso .org/
iso/ foreword .html.
This document was prepared jointly by Technical Committee ISO/TC 229, Nanotechnologies, and
Technical Committee IEC/TC 113, Nanotechnology for electrotechnical products and systems, in
collaboration with the European Committee for Standardization (CEN) Technical Committee CEN/
TC 352, Nanotechnologies, in accordance with the Agreement on technical cooperation between ISO and
CEN (Vienna Agreement). The draft was circulated for voting to the national bodies of both ISO and IEC.
This second edition cancels and replaces the first edition (ISO/TS 80004-8:2013), which has been
technically revised throughout.
A list of all parts in the ISO/TS 80004 series can be found on the ISO website.
Any feedback or questions on this document should be directed to the user’s national standards body. A
complete listing of these bodies can be found at www .iso .org/ members .html.
iv © ISO 2020 – All rights reserved
ISO/TS 80004-8:2020(E)
Introduction
Nanomanufacturing is the essential bridge between the discoveries of the nanosciences and real-world
nanotechnology products.
Advancing nanotechnology from the laboratory into volume production ultimately requires careful
study of manufacturing process issues including product design, reliability and quality, process design
and control, shop floor operations, supply chain management, workplace safety and health practices
during the production, use and handling of nanomaterials. Nanomanufacturing encompasses directed
self-assembly and assembly techniques, synthetic methodologies, and fabrication processes such as
lithography and biological processes. Nanomanufacturing also includes bottom-up directed assembly,
top-down high-resolution processing, molecular systems engineering and hierarchical integration with
larger scale systems. As dimensional scales of materials and molecular systems approach the nanoscale,
the conventional rules governing their behaviour may change significantly. As such, the behaviour of a
final product is enabled by the collective performance of its nanoscale building blocks.
Biological process terms are not included in this second edition of the nanomanufacturing vocabulary,
but considering the rapid development of the field, it is expected that terms in this important area will
be added in a future update to this document or in companion documents in the ISO/TS 80004 series.
This could include both the processing of biological nanomaterials and the use of biological processes to
manufacture materials at the nanoscale.
Similarly, additional terms from other developing areas of nanomanufacturing, including composite
manufacturing, roll-to-roll manufacturing and others, will be included in future documents.
There is a distinction between the terms “nanomanufacturing” and “nanofabrication”.
Nanomanufacturing encompasses a broader range of processes than does nanofabrication.
Nanomanufacturing encompasses all nanofabrication techniques and also techniques associated with
materials processing and chemical synthesis.
This document provides an introduction to processes used in the early stages of the nanomanufacturing
value chain, namely the intentional synthesis, generation or control of nanomaterials, including
fabrication steps in the nanoscale. The nanomaterials that result from these manufacturing processes
are distributed in commerce where, for example, they may be further purified, be compatabilized to
be dispersed in mixtures or composite matrices, or serve as integrated components of systems and
devices. The nanomanufacturing value chain is, in actuality, a large and diverse group of commercial
value chains that stretch across these sectors:
— the semiconductor industry (where the push to create smaller, faster, and more efficient
microprocessors heralded the creation of circuitry less than 100 nm in size);
— electronics and telecommunications;
— aerospace, defence and national security;
— energy and automotive;
— plastics and ceramics;
— forest and paper products;
— food and food packaging;
— pharmaceuticals, biomedicine and biotechnology;
— environmental remediation;
— clothing and personal care.
There are thousands of tonnes of nanomaterials on the market with end-use applications in several of
these sectors, such as carbon black and fumed silica. Nanomaterials that are rationally designed with
ISO/TS 80004-8:2020(E)
specific purpose are expected to radically change the landscape in areas such as biotechnology, water
purification and energy development.
The majority of clauses in this document are organized by process type. In Clause 6, the logic of
placement is as follows: in the step before the particle is made, the material itself is in a gas/liquid/
solid phase. The phase of the substrate or carrier in the process does not drive the categorization of the
process. As an example, consider iron particles that are catalysts in a process by which you seed oil with
iron particles, the oil vaporizes and condenses forming carbon particles on the iron particles. What
vaporizes is the oil, and therefore it is a gas phase process. Nanotubes grow from the gas phase, starting
with catalyst particles that react with the gas phase to grow the nanotubes, thus this is characterized
as a gas process. Indication of whether synthesis processes are used to manufacture nano-objects,
nanoparticles or both is provided in Annex A.
In addition, Annex A identifies the processes that are also applicable to macroscopic materials and are
therefore not exclusively relevant to nanomanufacturing. A common understanding of the terminology
used in practical applications will enable communities of practice in nanomanufacturing and will
advance nanomanufacturing strength worldwide. Extending the understanding of terms across the
existing manufacturing infrastructure will serve to bridge the transition between the innovations of
the research laboratory and the economic viability of nanotechnologies.
[11]
For informative terms supportive of nanomanufacturing terminology, see BSI PAS 135 .
This document belongs to a multi-part vocabulary covering the different aspects of nanotechnologies.
vi © ISO 2020 – All rights reserved
TECHNICAL SPECIFICATION ISO/TS 80004-8:2020(E)
Nanotechnologies — Vocabulary —
Part 8:
Nanomanufacturing processes
1 Scope
This document defines terms related to nanomanufacturing processes in the field of nanotechnologies.
All the process terms in this document are relevant to nanomanufacturing, however, many of the listed
processes are not exclusively relevant to the nanoscale. Terms that are not exclusive are noted within
the definitions. Depending on controllable conditions, such processes can result in material features at
the nanoscale or, alternatively, at larger scales.
There are many other terms that name tools, components, materials, system
...