|
SLOVENSKI STANDARD
01-januar-2023
Ogljikove plasti - Določanje optičnih lastnosti amorfnih ogljikovih plasti s
spektroskopsko elipsometrijo (ISO 23216:2021)
Carbon based films - Determination of optical properties of amorphous carbon films by
spectroscopic ellipsometry (ISO 23216:2021)
Kohlenstoffschichten - Bestimmung der optischen Eigenschaften von amorphen
Kohlenstoffschichten mittels spektroskopischer Ellipsometrie (ISO 23216:2021)
Films à base de carbone - Détermination des propriétés optiques des films de carbone
amorphe par ellipsométrie spectroscopique (ISO 23216:2021)
Ta slovenski standard je istoveten z: EN ISO 23216:2022
ICS:
25.220.99 Druge obdelave in prevleke Other treatments and
coatings
2003-01.Slovenski inštitut za standardizacijo. Razmnoževanje celote ali delov tega standarda ni dovoljeno.
EN ISO 23216
EUROPEAN STANDARD
NORME EUROPÉENNE
November 2022
EUROPÄISCHE NORM
ICS 25.220.99
English Version
Carbon based films - Determination of optical properties of
amorphous carbon films by spectroscopic ellipsometry
(ISO 23216:2021)
Films à base de carbone - Détermination des propriétés Kohlenstoffschichten - Bestimmung der optischen
optiques des films de carbone amorphe par Eigenschaften von amorphen Kohlenstoffschichten
ellipsométrie spectroscopique (ISO 23216:2021) mittels spektrokopischer Ellipsometrie (ISO
23216:2021)
This European Standard was approved by CEN on 30 October 2022.
CEN members are bound to comply with the CEN/CENELEC Internal Regulations which stipulate the conditions for giving this
European Standard the status of a national standard without any alteration. Up-to-date lists and bibliographical references
concerning such national standards may be obtained on application to the CEN-CENELEC Management Centre or to any CEN
member.
This European Standard exists in three official versions (English, French, German). A version in any other language made by
translation under the responsibility of a CEN member into its own language and notified to the CEN-CENELEC Management
Centre has the same status as the official versions.
CEN members are the national standards bodies of Austria, Belgium, Bulgaria, Croatia, Cyprus, Czech Republic, Denmark, Estonia,
Finland, France, Germany, Greece, Hungary, Iceland, Ireland, Italy, Latvia, Lithuania, Luxembourg, Malta, Netherlands, Norway,
Poland, Portugal, Republic of North Macedonia, Romania, Serbia, Slovakia, Slovenia, Spain, Sweden, Switzerland, Türkiye and
United Kingdom.
EUROPEAN COMMITTEE FOR STANDARDIZATION
COMITÉ EUROPÉEN DE NORMALISATION
EUROPÄISCHES KOMITEE FÜR NORMUNG
CEN-CENELEC Management Centre: Rue de la Science 23, B-1040 Brussels
© 2022 CEN All rights of exploitation in any form and by any means reserved Ref. No. EN ISO 23216:2022 E
worldwide for CEN national Members.
Contents Page
European foreword . 3
European foreword
The text of ISO 23216:2021 has been prepared by Technical Committee ISO/TC 107 "Metallic and other
inorganic coatings” of the International Organization for Standardization (ISO) and has been taken over
as EN ISO 23216:2022 by Technical Committee CEN/TC 262 “Metallic and other inorganic coatings,
including for corrosion protection and corrosion testing of metals and alloys” the secretariat of which is
held by BSI.
This European Standard shall be given the status of a national standard, either by publication of an
identical text or by endorsement, at the latest by May 2023, and conflicting national standards shall be
withdrawn at the latest by May 2023.
Attention is drawn to the possibility that some of the elements of this document may be the subject of
patent rights. CEN shall not be held responsible for identifying any or all such patent rights.
Any feedback and questions on this document should be directed to the users’ national standards body.
A complete listing of these bodies can be found on the CEN website.
According to the CEN-CENELEC Internal Regulations, the national standards organizations of the
following countries are bound to implement this European Standard: Austria, Belgium, Bulgaria,
Croatia, Cyprus, Czech Republic, Denmark, Estonia, Finland, France, Germany, Greece, Hungary, Iceland,
Ireland, Italy, Latvia, Lithuania, Luxembourg, Malta, Netherlands, Norway, Poland, Portugal, Republic of
North Macedonia, Romania, Serbia, Slovakia, Slovenia, Spain, Sweden, Switzerland, Türkiye and the
United Kingdom.
Endorsement notice
The text of ISO 23216:2021 has been approved by CEN as EN ISO 23216:2022 without any modification.
INTERNATIONAL ISO
STANDARD 23216
First edition
2021-05
Carbon based films — Determination
of optical properties of amorphous
carbon films by spectroscopic
ellipsometry
Films à base de carbone — Détermination des propriétés optiques des
films de carbone amorphe par ellipsométrie spectroscopique
Reference number
ISO 23216:2021(E)
©
ISO 2021
ISO 23216:2021(E)
© ISO 2021
All rights reserved. Unless otherwise specified, or required in the context of its implementation, no part of this publication may
be reproduced or utilized otherwise in any form or by any means, electronic or mechanical, including photocopying, or posting
on the internet or an intranet, without prior written permission. Permission can be requested from either ISO at the address
below or ISO’s member body in the country of the requester.
ISO copyright office
CP 401 • Ch. de Blandonnet 8
CH-1214 Vernier, Geneva
Phone: +41 22 749 01 11
Email: [email protected]
Website: www.iso.org
Published in Switzerland
ii © ISO 2021 – All rights reserved
ISO 23216:2021(E)
Contents Page
Foreword .iv
Introduction .v
1 Scope . 1
2 Normative references . 1
3 Terms and definitions . 1
4 Test specimen preparation . 1
5 Apparatus . 2
6 Procedure. 2
6.1 Treatment of specimen before test . 2
6.2 Preparation for test . 2
6.3 Testing conditions for test . 2
6.4 Optical model for analysis . 3
6.5 Number of test repeats . 3
7 Classification of test results . 3
8 Test report . 3
Annex A (normative) Classification method for amorphous carbon films by optical properties .5
Bibliography . 7
ISO 23216:2021(E)
Foreword
ISO (the International Organization for Standardization) is a worldwide federation of national standards
bodies (ISO member bodies). The work of preparing International Standards is normally carried out
through ISO technical committees. Each member body interested in a subject for which a technical
committee has been established has the right to be represented on that committee. International
organizations, governmental and non-governmental, in liaison with ISO, also take part in the work.
ISO collaborates closely with the International Electrotechnical Commission (IEC) on all matters of
electrotechnical standardization.
The procedures used to develop this document and those intended for its further maintenance are
described in the ISO/IEC Directives, Part 1. In particular, the different approval criteria needed for the
different types of ISO documents should be noted. This document was drafted in accordance with the
editorial rules of the ISO/IEC Directives, Part 2 (see www .iso .org/ directives).
Attention is drawn to the possibility that some of the elements of this document may be the subject of
patent rights. ISO shall not be held responsible for identifying any or all such patent rights. Details of
any patent rights identified during the development of the document will be in the Introduction and/or
on the ISO list of patent declarations received (see www .iso .org/ patents).
Any trade name used in this document is information given for the convenience of users and does not
constitute an endorsement.
For an explanation of the voluntary nature of standards, the meaning of ISO specific terms and
expressions related to conformity assessment, as well as information about ISO's adherence to the
World Trade Organization (WTO) principles in the Technical Barriers to Trade (TBT), see www .iso .org/
iso/ foreword .html.
This document was prepared by Technical Committee ISO/TC 107, Metallic and other inorganic coatings.
Any feedback or questions on this document should be directed to the user’s national standards body. A
complete listing of these bodies can be found at www .iso .org/ members .html.
iv © ISO 2021 – All rights reserved
ISO 23216:2021(E)
Introduction
This document provides a determination method and a classification for optical properties of
amorphous carbon films by spectroscopic ellipsometry.
2 3
Amorphous carbon films have a structure, containing both sp and sp bonded carbon atoms and
in several cases also hydrogen. There are graphite-like, polymer-like, glass-like and diamond-like
carbon films. Because of their outstanding mechanical properties, amorphous carbon films are used
in various hard coating applications on hard metals, e.g. as protective coatings against wear and
corrosion in automotive parts. Biomedical and optical applications on alternative substrate materials
such as silicon and glass have become more and more important. Currently, amorphous carbon films
are classified into several types with regard to their chemical structures, and each type is selectively
used according to its appropriate application. For an easy classification of amorphous carbon films, an
optically quantified phase fingerprint with high accuracy is provided as a result of an international
interlaboratory comparison.
The optical properties of refractive index n and extinction coefficient k determined by spectroscopic
ellipsometry are the key quantities for the proposed classification of amorphous carbon films. The
interlaboratory comparison demonstrated that a classification within the n-k plane is feasible for
all types of amorphous carbon films. This will be beneficial for the identification of the coating type
on alternative substrate materials (such as silicon and glass) and additional industrial applications.
Spectroscopic ellipsometry as a fast and non-destructive analytical method can also be applied
to quality control and development in industrial applications, given that smooth and well-defined
substrate materials are used and appropriate modelling is applied.
This document is intended to implement recommended ellipsometric test conditions and the n-k plane
classification scheme of amorphous carbon films on silicon wafers.
This document is useful for the complementary optical property classification and quality control of
amorphous carbon films.
As amorphous carbon films show a huge diversity of structure and properties, it is crucial to select
the appropriate type of amorphous carbon film to exploit their excellent properties in practical use.
Therefore, carbon films are characterized by spectroscopic ellips
...